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深圳证券交易所

股票代码:002819

股票代码

SZ002819

400-650-5566

FEMTO VITA-E 等离子清洗机

femto VITA-E 等离子清洗机
KEY FEATURES
? Etching, Ashing, De-oxidation System
? Multi-generator for High Density Plasma

SPECIFICATIONS
? High Density Plasma Etching Mode
? 4", 6", 8" Substrate Loading
? Single or Multi LF/RF Generator
? Up to 8 Process Gas Channels
? Integration with Ultrasonic Source

APPLICATIONS
? De-oxidation for Electronic Packaging Industry
? Plasma Annealing for Metal Science
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